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參數(shù)資料
| 型號： | FC261 |
| 廠商： | Electronic Theatre Controls, Inc. |
| 英文描述： | Mass Flow Controllers and Flowmeters |
| 中文描述： | 質量流量控制器和流量計 |
| 文件頁數(shù)： | 1/3頁 |
| 文件大小： | 151K |
| 代理商： | FC261 |
P
Attitude Insensitive Flow Sensor
Eliminates air convection currents inside its case without sacrificing
response speed.
Can be mounted in any position without requiring zero adjustment.
Superior Bypass Design to Operate
under Laminar Flow Conditions
Assures accuracy over the entire range of mass flow controller.
Easily removed for range changes.
Solid State Valve Assembly
Constructed of Type 316 Stainless
Steel
Completely compatible with reactive and corrosive materials.
Design eliminates internal dead volumes.
Laminar Flow
Eliminates the need for complex, interactive multi-point linearization
during calibration
Product Features
Product Benefits
Process Values
Designed to meet the exacting requirements of
semiconductor processes and equipment, the
Tylan FC260 and Tylan FM360 models are
premium quality elastomer-sealed mass flow
controllers and meter. These MFCs combine
proven components and techniques with
innovative concepts in both mechanical and
electrical design.
Excellent Performance
Tylan FC260 qnd FM360 mass flow controllers and
flowmeters accurately and reliably measure and
control flow rates of gases up to 200 standard liters
per minute without the need for pressure or
temperature corrections.
Low cost mass flow controllers with long-term repeatability and performance
Tylan FC260/FM360
Mass Flow Controllers and Flowmeters
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